Investigations on the high-temperature performance of sputter-deposited aluminium oxide thin films

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 764-767

  Fricke, Soeren ^a,b   Friedberger, Alois ^b   Mueller, Gerhard ^b   Seidel, Helmut ^a   Schmid, Ulrich ^a  

^a SAARLAND UNIVERSITY   (Germany)

^b AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; HIGH TEMPERATURE APPLICATIONS; OXIDE FILMS; OXIDES; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS;

ALUMINIUM OXIDES; ALUMINUM OXIDE THIN FILMS; FILM PROPERTIES; HIGH TEMPERATURE SENSORS; HIGH TEMPERATURES; POST DEPOSITIONS; SILICON SUBSTRATES; STRUCTURAL CHARACTERIZATIONS;

SENSORS;

EID: 48349120661     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388512     Document Type: Conference Paper

References (11)

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