Cross-coupling in sealed cMUT arrays for immersion applications

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 2135-2138

  Campbell, E ^a   Davis, L A J ^b   Hayward, G ^a   Hutchins, D ^b  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROACOUSTIC TRANSDUCERS; FINITE ELEMENT METHOD; TRANSDUCERS; ULTRASONIC TRANSDUCERS; ULTRASONICS; UNDERWATER ACOUSTICS;

2-D ARRAY; APPLICATIONS.; ARRAY CONFIGURATIONS; BIOMEDICAL ULTRASOUND; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS; CHARACTERISATION; CROSS COUPLED; CROSS COUPLINGS; FINITE ELEMENT; FINITE ELEMENT CODE; FUTURE TECHNOLOGIES; HIGH FREQUENCY SONAR; IMAGING ARRAYS; LASER VIBROMETER; MULTI-CAVITY; PARYLENE-C; POLYTEC;

ULTRASONIC IMAGING;

EID: 48149114457     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.537     Document Type: Conference Paper

References (5)

1. I. Ladabaum, X. Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," in IEEE Trans. Ultrason., Ferroelect., Freq. Contrl., vol. 45, pp. 678-690, May 1998.
2. R. A. Noble, A. D. R. Jones, T. J. Robertson, D. A. Hutchins, and D. R. Billson, "Novel, wide bandwidth, micromachined ultrasonic transducers," in IEEE Trans. Ultrason., Ferroelect., Freq. Contrl., vol. 48, pp. 1495-1507, Nov. 2001.
3. D. Vaughan and J. Mould, Flex User's Manual revision 1-J.10, 2006.
4. X. Jin, F. L. Degertekin, and B. T. Khuri-Yakub, "Characterization of onedimensional capacitive micromachined ultrasonic immersion transducer arrays," in IEEE Trans. Ultrason., Ferroelect., Freq. Contrl., vol. 48, pp. 750-760, May 2001.
5. G. Wojcik, J. Mould, P. Reynolds, A. Fitzgerald, P. Wagner, and I. Ladabaum, "Time-domain models of MUT array cross-talk in silicon substrates," in Proceedings of the IEEE Symposium, pp. 909-914, 2000.