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Journal of Magnetism and Magnetic Materials

Volumn 320, Issue 20, 2008, Pages

Fabrication and performance of Fe-based magnetic thin film inductor for high-frequency application

(5) Zhou, Yong a Zhou, Zhi Min a Cao, Ying a Gao, Xiao Yu a Ding, Wen a

a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS (China)

Author keywords

FeCuNbCrSiB magnetic thin film; Inductance; MEMS; Solenoid type inductor

Indexed keywords

ALUMINUM; COPPER; IRON; MAGNETIC CIRCUITS; MAGNETIC DEVICES; MAGNETIC FILMS; MAGNETIC MATERIALS; MAGNETRON SPUTTERING; OPTICAL DESIGN; SOLIDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

(O-SEC.-BUTYLDITHIOCARBONATIO-S ,S') COPPER; HIGH-FREQUENCY (HF); MAGNETIC (CE); TECHNOLOGICAL PROCESSES; THIN FILM INDUCTORS;

MAGNETIC THIN FILMS;

EID: 47849119040 PISSN: 03048853 EISSN: None Source Type: Journal
DOI: 10.1016/j.jmmm.2008.04.136 Document Type: Article

Times cited : (8)

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