Integrated solenoid inductors with patterned, sputter-deposited Cr/Fe10Co90/Cr ferromagnetic cores

IEEE Electron Device Letters

Volumn 24, Issue 4, 2003, Pages 224-226

  Zhuang, Yan ^a   Rejaei, B ^a   Boellaard, E ^a   Vroubel, M ^a   Burghartz, J N ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Inductor; Micropatterning; On chip; Radio frequency; Shadow mask

Indexed keywords

CHROMIUM; CMOS INTEGRATED CIRCUITS; COBALT; ELECTRIC INDUCTORS; FERROMAGNETIC MATERIALS; INDUCTANCE; IRON; MAGNETIC FIELD EFFECTS; MAGNETIC FILMS; MAGNETRON SPUTTERING; MASKS; SOLENOIDS;

FERROMAGNETIC CORES; INTEGRATED SOLENOID INDUCTORS; MICROPATTERNING; RADIO FREQUENCY; SHADOW MASK;

MAGNETIC CORES;

EID: 0038104354     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2003.810880     Document Type: Letter

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