Characterization of integrated tin oxide gas sensors with metal additives and ion implantations

IEEE Sensors Journal

Volumn 8, Issue 8, 2008, Pages 1397-1398

  Guo, Bin ^b   Bermak, Amine ^a,b   Chan, Philip C H ^a,b   Yan, Gui Zhen ^c  

^a IEEE

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^c PEKING UNIVERSITY   (China)

Author keywords

Array; Drift; Post treatment; Tin oxide

Indexed keywords

CHEMICAL SENSORS; DETECTORS; GAS DETECTORS; GASES; ION BOMBARDMENT; ION IMPLANTATION; IONS; KETONES; METALS; OXIDE FILMS; SENSOR ARRAYS; SENSORS; TIN; TITANIUM COMPOUNDS;

MEASUREMENT RESULTS; METAL ADDITIVES; OXIDE GAS; POST TREATMENTS; RECOGNITION PERFORMANCE; SENSING FILMS; SENSING PROPERTIES; SENSOR SENSITIVITIES; TIN OXIDE GAS SENSORS;

DOPING (ADDITIVES);

EID: 47849110913     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.920708     Document Type: Article

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