Novel junction engineering scheme using combination of LSA and spike-RTA

Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007

Volumn , Issue , 2007, Pages 135-136

  Endo, S ^a   Maruyama, Y ^a   Kawasaki, Y ^a   Yamashita, T ^a   Oda, H ^a   Inoue, Y ^a  

^a RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 47649088490     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IWJT.2007.4279967     Document Type: Conference Paper

References (4)

1. A. Shima et al., Symp. VLSI Tech. Dig., (2004) p.174
2. Severi et al., IEDM Tech Dig., (2006) p.859
3. B. Josse et al., IEDM Tech Dig., (2006) p.693
4. K. Adachi et al., Symp. VLSI Tech. Dig., (2005) p.142