Mixed cation phases in sputter deposited HfO2 -Ti O2 nanolaminates

Applied Physics Letters

Volumn 93, Issue 2, 2008, Pages

  Cisneros Morales, M C ^a   Aita, C R ^a  

^a University of Wisconsin Milwaukee   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM; HAFNIUM COMPOUNDS;

NANO LAMINATES;

SPUTTERING;

EID: 47549084051     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2957670     Document Type: Article

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