Modeling of MEMS thermal actuation with external heat source

Electronics, Robotics and Automotive Mechanics Conference, CERMA 2007 - Proceedings

Volumn , Issue , 2007, Pages 591-596

  Varona, J ^a   Tecpoyotl Torres, M ^a   Hamoui, A A ^b  

^a UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MORELOS   (Mexico)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC COMPOUNDS; AUTOMATION; AUTOMOBILE ELECTRONIC EQUIPMENT; AUTOMOBILE PARTS AND EQUIPMENT; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; MEMS; MICROELECTROMECHANICAL DEVICES; SPEED; STANDARDS; SURFACE MICROMACHINING; THERMOANALYSIS;

ANALYSIS AND DESIGN; AUTOMOTIVE MECHANICS; HEAT SOURCING; MATHEMATICAL DESCRIPTIONS; MEMS DEVICES; MICRO-ACTUATORS; MICROELECTROMECHANICAL-SYSTEMS (MEMS) TECHNOLOGY; NUMERICAL SIMULATIONS; POWER CONSUMPTION (CE);

ACTUATORS;

EID: 47349100937     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CERMA.2007.4367751     Document Type: Conference Paper

References (14)

1. S.A. Jacobson and A.H. Epstein, An Informal Survey of Power MEMS, International Symposium on Micro-Mechanical Engineering, Dec. 2003.
2. G. Hang and A. Lal, Self-reciprocating radioisotope-powered cantilever, Journal of Applied Physics, Vol. 92, No.2, pp 1122-1127, July 2002.
3. D. Ryan and R. LaFollete, Power Supply and Energy Storage for Autonomous MEMS, Proc. of SAE Power Systems Conference, pp 359-363, November 2000.
4. Huang Q. and Lee N., Analysis and design of polysilicon thermal flexure actuator, J. Micromech. Microeng. 9, 64-70, 1999.
5. N.D. Mankame and G.K. Ananthasuresh, Comprehensive thermal modeling and characterization of an electrothermal-compliant microactuator, J. Micromech. Microeng. 11 452-62, 2001.
6. Yan D, Khajepour A and Mansour R, Modeling of two-hot-arm horizontal thermal actuator, J. Micromech. Microeng. 13 312-322, 2003.
7. Yan D, Khajepour A and Mansour R, Design and Modeling of a MEMS bidirectional vertical thermal actuator, J. Micromech. Microeng. 14 841-850, 2004.
8. B.L. Weaver et al., U.S. Patent 6,483,419, Nov. 2002.
9. L. Que, J.-S. Park, and Y.B. Gianchandani, Bent-Beam Electrothermal Actuators - Part I: Single Beam and Cascaded Devices, Journal of Microelectromechanical Systems, vol. 10, no. 2, pp. 247-54, 2001.
10. J. Carter et al., PolyMUMPS Design Handbook, MEMSCAP Inc., Revision 11.0, 2005.
11. Fu H. et al., A One-Dimensional Model for Heat Transfer in Engine Exhaust Systems, SAE Technical Paper 2005-01-0696
12. Cheng Y. et al., Thermal Analysis for Indirect Liquid Cooled MultiChip Module Using Computational Fluid Dynamic Simulation and Response Surface Methodology, IEEE Trans. Comp. Packag. Technol., vol. 29, no. 1, pp. 39-46, March 2006.
13. C.JM. Lasance and R.E. Simons, Advances In High-Performance Cooling For Electronics, Electronics Cooling, November 2005, available on-line at: http://www.electronics-cooling.com/articles/2005/2005_nov_article2.php
14. P.E. Clark et al., Small Power Technology Systems for Tetrahedral Rovers, American Institute of Physics Conference Proceedings, Vol. 813, pp. 889-897, Jan 2006.