Effects of annealing on microstructure and optical properties of TiO 2 sculptured thin films

Chinese Physics Letters

Volumn 25, Issue 6, 2008, Pages 2181-2184

  Xiao, Xiu Di ^a,b   Dong, Guo Ping ^a,b   Qi, Hong Ji ^a,c   Fan, Zheng Xiu ^a   He, Hong Bo ^a   Shao, Jian Da ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c NONE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; MICROSTRUCTURE; THIN FILMS; TITANIUM DIOXIDE; ULTRAVIOLET SPECTROSCOPY;

EFFECT OF ANNEALING; FIELD EMISSION SEM; LINEAR BIREFRINGENCE; MICRO-STRUCTURAL; SCULPTURED THIN FILMS; THERMAL-ANNEALING; TIO 2; UV-VIS-NIR; VIS-NIR SPECTRA; XRD;

ANNEALING;

EID: 46749083445     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/25/6/070     Document Type: Article

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