메뉴 건너뛰기




Volumn 37, Issue 4, 2007, Pages 397-404

Uncertainty of atomic force microscopy measurements

Author keywords

Atomic force microscopy (AFM); Uncertainty of measurement

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; CONTROL SYSTEMS; MEASUREMENTS; MICROSCOPIC EXAMINATION; SPACE PROBES; UNCERTAINTY ANALYSIS;

EID: 46649118858     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (22)
  • 4
    • 20444431082 scopus 로고
    • Classical and quantum chaos from continuous quantum measurements
    • MENSKY M.B., Classical and quantum chaos from continuous quantum measurements, Chaos, Solitons and Fractals 5(7), 1995, pp. 1381-7.
    • (1995) Chaos, Solitons and Fractals , vol.5 , Issue.7 , pp. 1381-1387
    • MENSKY, M.B.1
  • 5
    • 46649099783 scopus 로고    scopus 로고
    • TAYLOR B.N., KUYATT C.E., Guidelines for evaluating and expressing the uncertainty of NIST measurement results, NIST Technical Note 1297 (1994 Edition).
    • TAYLOR B.N., KUYATT C.E., Guidelines for evaluating and expressing the uncertainty of NIST measurement results, NIST Technical Note 1297 (1994 Edition).
  • 6
    • 46649088087 scopus 로고    scopus 로고
    • Guide to the Expression of Uncertainty in Measurement, BIPM, IEC, IFCC, ISO, IUPAC, IUPAP, OIML, 1st Edition 1993 (corrected 1995).
    • Guide to the Expression of Uncertainty in Measurement, BIPM, IEC, IFCC, ISO, IUPAC, IUPAP, OIML, 1st Edition 1993 (corrected 1995).
  • 8
    • 33748918904 scopus 로고    scopus 로고
    • A generalized confidence interval for a measurand in the presence of type-A and type-B uncertainties
    • WANG C.M., IYER H.K., A generalized confidence interval for a measurand in the presence of type-A and type-B uncertainties, Measurement 39(9), 2006, pp. 856-63.
    • (2006) Measurement , vol.39 , Issue.9 , pp. 856-863
    • WANG, C.M.1    IYER, H.K.2
  • 9
    • 0029368394 scopus 로고
    • On the application of the guide to the expression of uncertainty in measurement to measuring instruments
    • ARRI E., CABIATI F., D'EMILIO S., GONELLA L., On the application of the guide to the expression of uncertainty in measurement to measuring instruments, Measurement 16(1), 1995, pp. 51-7.
    • (1995) Measurement , vol.16 , Issue.1 , pp. 51-57
    • ARRI, E.1    CABIATI, F.2    D'EMILIO, S.3    GONELLA, L.4
  • 10
    • 0035314034 scopus 로고    scopus 로고
    • A fuzzy approach to the expression of uncertainty in measurement
    • MAURIS G., LASSERRE V., FOULLOY L., A fuzzy approach to the expression of uncertainty in measurement, Measurement 29(3), 2001, pp. 165-77.
    • (2001) Measurement , vol.29 , Issue.3 , pp. 165-177
    • MAURIS, G.1    LASSERRE, V.2    FOULLOY, L.3
  • 12
    • 34247209203 scopus 로고    scopus 로고
    • Optical encoder calibration using lattice spacing and optical fringe derived from a scanning tunnelling microscope and optical interferometer
    • AKETAGAWA M., IKEDA Y., TANYARAT N., ISHIGE M., Optical encoder calibration using lattice spacing and optical fringe derived from a scanning tunnelling microscope and optical interferometer, Measurement Science and Technology 18(2), 2007, pp. 503-9.
    • (2007) Measurement Science and Technology , vol.18 , Issue.2 , pp. 503-509
    • AKETAGAWA, M.1    IKEDA, Y.2    TANYARAT, N.3    ISHIGE, M.4
  • 13
    • 14944348796 scopus 로고    scopus 로고
    • Traceable calibration of transfer standards for scanning probe microscopy
    • HAYCOCKS J., JACKSON K., Traceable calibration of transfer standards for scanning probe microscopy, Precision Engineering 29(2), 2005, pp. 168-75.
    • (2005) Precision Engineering , vol.29 , Issue.2 , pp. 168-175
    • HAYCOCKS, J.1    JACKSON, K.2
  • 14
    • 34247268333 scopus 로고    scopus 로고
    • Higher order tip effects in traceable CD-AFM-based linewidth measurements
    • ORJI N.G., DIXSON R.G., Higher order tip effects in traceable CD-AFM-based linewidth measurements, Measurement Science and Technology 18(2), 2007, pp. 448-55.
    • (2007) Measurement Science and Technology , vol.18 , Issue.2 , pp. 448-455
    • ORJI, N.G.1    DIXSON, R.G.2
  • 19
    • 0037390706 scopus 로고    scopus 로고
    • Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope
    • MISUMI I., GONDA S., KUROSAWA T., TAKAMASU K., Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope, Measurement Science and Technology 14(4), 2003, pp. 463-71.
    • (2003) Measurement Science and Technology , vol.14 , Issue.4 , pp. 463-471
    • MISUMI, I.1    GONDA, S.2    KUROSAWA, T.3    TAKAMASU, K.4
  • 21
    • 0032118306 scopus 로고    scopus 로고
    • Long-range AFM profiler used for accurate pitch measurements
    • MELI F., THALMANN R., Long-range AFM profiler used for accurate pitch measurements, Measurement Science and Technology 9(7), 1998, pp. 1087-92.
    • (1998) Measurement Science and Technology , vol.9 , Issue.7 , pp. 1087-1092
    • MELI, F.1    THALMANN, R.2
  • 22
    • 0037222064 scopus 로고    scopus 로고
    • Calibration of step heights and roughness measurements with atomic force microscopes
    • GARNAES J., KOFOD N., KÜHLE A., NIELSEN C., DIRSCHERL K., BLUNT L., Calibration of step heights and roughness measurements with atomic force microscopes, Precision Engineering 27(1), 2003, pp. 91-8.
    • (2003) Precision Engineering , vol.27 , Issue.1 , pp. 91-98
    • GARNAES, J.1    KOFOD, N.2    KÜHLE, A.3    NIELSEN, C.4    DIRSCHERL, K.5    BLUNT, L.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.