Fabrication of large area nano-rings for MRAM application

Microelectronic Engineering

Volumn 85, Issue 7, 2008, Pages 1555-1560

  Luo, Yong ^a   Misra, Veena ^a  

^a North Carolina State University   (United States)

Author keywords

De centered ring; Lateral etch; Magnetic ring

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; LITHOGRAPHY; MAGNETIC RESONANCE IMAGING; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SQUIDS;

DE-CENTERED RING; DEEP ULTRAVIOLET LITHOGRAPHY; LATERAL ETCH; MAGNETIC RING;

NANOSTRUCTURED MATERIALS;

EID: 46549089228     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.03.004     Document Type: Article

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