Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet

Vacuum

Volumn 82, Issue 11, 2008, Pages 1162-1167

  Iseki, Takayuki ^a   Maeda, Hiroaki ^b   Itoh, Takashi ^b  

^a Victor Company of Japan Limited   (Japan)

^b Japan Ltd   (Japan)

Author keywords

Eccentrically rotating magnet; Erosion; Magnetron sputtering; Nickel; Target utilization

Indexed keywords

EROSION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; NICKEL;

ECCENTRICALLY ROTATING MAGNET; TARGET UTILIZATION;

FERROMAGNETIC MATERIALS;

EID: 46549088326     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.055     Document Type: Review

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7. Iseki T, Maeda H, Itoh T. Wide erosion nickel magnetron sputtering using an eccentrically rotating center magnet. Vacuum, in press. doi:10.1016/j.vacuum.2008.03.073.