Computational studies on the erosion process in a magnetron sputtering system with a ferromagnetic target

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 3 A, 1998, Pages 965-969

  Ido, Shunji ^a   Suzuki, Takeshi ^a   Kashiwagi, Mieko ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

Erosion process; FEM code; Ferromagnetic targets; Magnetron sputtering; Particle orbit simulation

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS;

EROSION PROCESS; PARTICLE ORBITS;

FERROMAGNETIC MATERIALS;

EID: 0032023362     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.965     Document Type: Article

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