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Volumn 63, Issue 6, 2008, Pages 692-699

Hydrogen effects on copper, zinc and nickel atomic emission lines in argon radiofrequency glow discharge optical emission spectrometry

Author keywords

Atomic emission spectrometry; Emission yield; Hydrogen effect; Radiofrequency glow discharge; Sputtering rate

Indexed keywords

CONCENTRATION (PROCESS); GLOW DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; PLASMAS; SPUTTERING;

EID: 46549084416     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2008.04.010     Document Type: Article
Times cited : (7)

References (26)
  • 1
    • 0028963025 scopus 로고
    • Effect of oxygen addition to an argon glow-discharge plasma source in atomic emission spectrometry
    • Wagatsuma K., and Hirokawa K. Effect of oxygen addition to an argon glow-discharge plasma source in atomic emission spectrometry. Anal. Chim. Acta 306 (1995) 193-200
    • (1995) Anal. Chim. Acta , vol.306 , pp. 193-200
    • Wagatsuma, K.1    Hirokawa, K.2
  • 2
    • 0032648698 scopus 로고    scopus 로고
    • Evaluation of helium-argon mixed gas plasmas for bulk and depth-resolved analyses by radiofrequency glow discharge atomic emission spectroscopy
    • Hartenstein M.L., Christopher S.J., and Marcus R.K. Evaluation of helium-argon mixed gas plasmas for bulk and depth-resolved analyses by radiofrequency glow discharge atomic emission spectroscopy. J. Anal. At. Spectrom. 14 (1999) 1039-1048
    • (1999) J. Anal. At. Spectrom. , vol.14 , pp. 1039-1048
    • Hartenstein, M.L.1    Christopher, S.J.2    Marcus, R.K.3
  • 3
    • 0035121117 scopus 로고    scopus 로고
    • The effect of small quantities of hydrogen on a glow discharge in neon. Comparison with the argon case
    • Hodoroaba V.-D., Steers E.B.M., Hoffmann V., and Wetzig K. The effect of small quantities of hydrogen on a glow discharge in neon. Comparison with the argon case. J. Anal. At. Spectrom. 16 (2001) 43-49
    • (2001) J. Anal. At. Spectrom. , vol.16 , pp. 43-49
    • Hodoroaba, V.-D.1    Steers, E.B.M.2    Hoffmann, V.3    Wetzig, K.4
  • 4
    • 0035978230 scopus 로고    scopus 로고
    • Emission characteristics of mixed gas plasmas in low-pressure glow discharges
    • Wagatsuma K. Emission characteristics of mixed gas plasmas in low-pressure glow discharges. Spectrochim. Acta Part B 56 (2001) 465-486
    • (2001) Spectrochim. Acta Part B , vol.56 , pp. 465-486
    • Wagatsuma, K.1
  • 5
    • 0036435463 scopus 로고    scopus 로고
    • The influence of hydrogen, nitrogen or oxygen additions to radiofrequency argon glow discharges for optical emission spectrometry
    • Fernández B., Bordel N., Pereiro R., and Sanz-Medel A. The influence of hydrogen, nitrogen or oxygen additions to radiofrequency argon glow discharges for optical emission spectrometry. J. Anal. At. Spectrom. 17 (2002) 1549-1555
    • (2002) J. Anal. At. Spectrom. , vol.17 , pp. 1549-1555
    • Fernández, B.1    Bordel, N.2    Pereiro, R.3    Sanz-Medel, A.4
  • 6
    • 84996036569 scopus 로고
    • 2 gas mixture in glow discharge mass spectrometry
    • 2 gas mixture in glow discharge mass spectrometry. Anal. Sci. 7 (1991) 541-543
    • (1991) Anal. Sci. , vol.7 , pp. 541-543
    • Saito, M.1
  • 8
    • 0001087992 scopus 로고
    • Quenching mechanisms in argon-nitrogen or neon-nitrogen glow discharge plasmas
    • Wagatsuma K., and Hirokawa K. Quenching mechanisms in argon-nitrogen or neon-nitrogen glow discharge plasmas. Anal. Chem. 61 (1989) 326-329
    • (1989) Anal. Chem. , vol.61 , pp. 326-329
    • Wagatsuma, K.1    Hirokawa, K.2
  • 9
    • 0035982119 scopus 로고    scopus 로고
    • Hydrogen addition to an argon glow discharge: a numerical simulation
    • Bogaerts A. Hydrogen addition to an argon glow discharge: a numerical simulation. J. Anal. At. Spectrom. 17 (2002) 768-779
    • (2002) J. Anal. At. Spectrom. , vol.17 , pp. 768-779
    • Bogaerts, A.1
  • 10
    • 0037325331 scopus 로고    scopus 로고
    • Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry
    • Fernández B., Bordel N., Pereiro R., and Sanz-Medel A. Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry. J. Anal. At. Spectrom. 18 (2003) 151-156
    • (2003) J. Anal. At. Spectrom. , vol.18 , pp. 151-156
    • Fernández, B.1    Bordel, N.2    Pereiro, R.3    Sanz-Medel, A.4
  • 11
    • 0038467224 scopus 로고    scopus 로고
    • Influence of hydrogen on the analytical figures of merit of glow discharge optical emission spectroscopy-friend or foe?
    • Hodoroaba V.-D., Steers E.B.M., Hoffmann V., Unger W.E.S., Paatsch W., and Wetzig K. Influence of hydrogen on the analytical figures of merit of glow discharge optical emission spectroscopy-friend or foe?. J. Anal. At. Spectrom. 18 (2003) 521-526
    • (2003) J. Anal. At. Spectrom. , vol.18 , pp. 521-526
    • Hodoroaba, V.-D.1    Steers, E.B.M.2    Hoffmann, V.3    Unger, W.E.S.4    Paatsch, W.5    Wetzig, K.6
  • 13
    • 0036610996 scopus 로고    scopus 로고
    • Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections
    • Payling R., Michler J., and Aeberhard M. Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections. Surf. Interface Anal. 33 (2002) 472-477
    • (2002) Surf. Interface Anal. , vol.33 , pp. 472-477
    • Payling, R.1    Michler, J.2    Aeberhard, M.3
  • 14
    • 41349117826 scopus 로고    scopus 로고
    • Effect of small amounts of hydrogen added to argon glow discharges: Hybrid Monte Carlo - fluid model
    • Bogaerts A., and Gijbels R. Effect of small amounts of hydrogen added to argon glow discharges: Hybrid Monte Carlo - fluid model. Phys. Rev. E 65 (2002) 056402
    • (2002) Phys. Rev. E , vol.65 , pp. 056402
    • Bogaerts, A.1    Gijbels, R.2
  • 15
    • 0036022947 scopus 로고    scopus 로고
    • Hybrid Monte Carlo - fluid modeling network for an argon/hydrogen direct current glow discharge
    • Bogaerts A., and Gijbels R. Hybrid Monte Carlo - fluid modeling network for an argon/hydrogen direct current glow discharge. Spectrochim. Acta Part B 57 (2002) 1071-1099
    • (2002) Spectrochim. Acta Part B , vol.57 , pp. 1071-1099
    • Bogaerts, A.1    Gijbels, R.2
  • 16
    • 0037929521 scopus 로고    scopus 로고
    • The influence of added hydrogen to an argon direct current glow discharge for time of flight mass spectrometry detection
    • Menéndez A., Pisonero J., Pereiro R., Bordel N., and Sanz-Medel A. The influence of added hydrogen to an argon direct current glow discharge for time of flight mass spectrometry detection. J. Anal. At. Spectrom. 18 (2003) 557-563
    • (2003) J. Anal. At. Spectrom. , vol.18 , pp. 557-563
    • Menéndez, A.1    Pisonero, J.2    Pereiro, R.3    Bordel, N.4    Sanz-Medel, A.5
  • 18
    • 0034250701 scopus 로고    scopus 로고
    • Emission spectra of copper and argon in an argon glow discharge containing small quantities of hydrogen
    • Hodoroaba V.-D., Hoffmann V., Steers E.B.M., and Wetzig K. Emission spectra of copper and argon in an argon glow discharge containing small quantities of hydrogen. J. Anal. At. Spectrom. 15 (2000) 951-958
    • (2000) J. Anal. At. Spectrom. , vol.15 , pp. 951-958
    • Hodoroaba, V.-D.1    Hoffmann, V.2    Steers, E.B.M.3    Wetzig, K.4
  • 19
    • 33646466809 scopus 로고    scopus 로고
    • Asymmetric charge transfer with hydrogen ions - an important factor in the "hydrogen effect" in glow discharge optical emission spectroscopy
    • Steers E.B.M., Smid P., and Weiss Z. Asymmetric charge transfer with hydrogen ions - an important factor in the "hydrogen effect" in glow discharge optical emission spectroscopy. Spectrochim. Acta Part B 61 (2006) 414-420
    • (2006) Spectrochim. Acta Part B , vol.61 , pp. 414-420
    • Steers, E.B.M.1    Smid, P.2    Weiss, Z.3
  • 20
    • 24644486563 scopus 로고    scopus 로고
    • Excitation of zinc in a Grimm-type glow discharge: effects of hydrogen and other excitation-related matrix effects
    • Weiss Z., Steers E.B.M., and Smid P. Excitation of zinc in a Grimm-type glow discharge: effects of hydrogen and other excitation-related matrix effects. J. Anal. At. Spectrom. 20 (2005) 839-846
    • (2005) J. Anal. At. Spectrom. , vol.20 , pp. 839-846
    • Weiss, Z.1    Steers, E.B.M.2    Smid, P.3
  • 21
    • 0032475573 scopus 로고    scopus 로고
    • Effect of operation parameters on the sputtering and emission processes in radiofrequency glow discharge. A comparison with the direct-current mode
    • Pérez C., Pereiro R., Bordel N., and Sanz-Medel A. Effect of operation parameters on the sputtering and emission processes in radiofrequency glow discharge. A comparison with the direct-current mode. Spectrochim. Acta Part B 53 (1998) 1541-1551
    • (1998) Spectrochim. Acta Part B , vol.53 , pp. 1541-1551
    • Pérez, C.1    Pereiro, R.2    Bordel, N.3    Sanz-Medel, A.4
  • 22
    • 0000328335 scopus 로고
    • Characterization of a radio frequency glow discharge emission source
    • Winchester M.R., Lazik C., and Marcus R.K. Characterization of a radio frequency glow discharge emission source. Spectrochim. Acta Part B 46 (1991) 483-499
    • (1991) Spectrochim. Acta Part B , vol.46 , pp. 483-499
    • Winchester, M.R.1    Lazik, C.2    Marcus, R.K.3
  • 23
    • 46549084003 scopus 로고    scopus 로고
    • NIST Atomic Spectra Database (http://physics.nist.gov/cgi-bin/Atdata/main_asd).
    • NIST Atomic Spectra Database (http://physics.nist.gov/cgi-bin/Atdata/main_asd).
  • 24
    • 46549089424 scopus 로고    scopus 로고
    • J.E. Sansonetti, W.C. Martin, Handbook of Basic Atomic Spectroscopic Data, National Institute of Standards and Technology (http://physics.nist.gov/PhysRefData/Handbook).
    • J.E. Sansonetti, W.C. Martin, Handbook of Basic Atomic Spectroscopic Data, National Institute of Standards and Technology (http://physics.nist.gov/PhysRefData/Handbook).
  • 25
    • 36248990254 scopus 로고    scopus 로고
    • A. Martin, N. Bordel, R. Pereiro, A. Sanz-Medel, An approach to calculate sputtering rates in glow discharges by using a new crater volume evaluation method, Spectrochim. Acta Part B, doi:10.1016/j.sab.2007.10.012.
    • A. Martin, N. Bordel, R. Pereiro, A. Sanz-Medel, An approach to calculate sputtering rates in glow discharges by using a new crater volume evaluation method, Spectrochim. Acta Part B, doi:10.1016/j.sab.2007.10.012.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.