Impact of two-step growth upon In2O3(ZnO)5 film quality

Key Engineering Materials

Volumn 228-229, Issue , 2002, Pages 167-172

  Ogino, Tsuyoshi ^a   Ohashi, Naoki ^a   Sakaguchi, Isao ^a   Hishita, Shun Ichi ^a   Adachi, Yutaka ^a   Haneda, Hajime ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Doping; Homologous; Sputtering; Superlattice; Zinc Oxide

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; CRYSTALLIZATION; DEPOSITION; DOPING (ADDITIVES); EPITAXIAL GROWTH; SPUTTERING; SUPERLATTICES; ZINC OXIDE;

TRANSPARENT CONDUCTING OXIDES (TCO);

THIN FILMS;

EID: 4644328926     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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