Shape transition of nanostructures created on Si(1 0 0) surfaces after MeV implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 244, Issue 1, 2006, Pages 74-77

  Paramanik, D ^a   Dey, S ^a   Ganesan, V ^b   Varma, S ^a  

^a INSTITUTE OF PHYSICS   (India)

^b UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

FLUENCES; IMPLANTATION; NANOSTRUCTURES; SCANNING PROBE MICROSCOPY;

ANTIMONY; ION IMPLANTATION; SCANNING; SILICON; SURFACE ROUGHNESS; SURFACE TREATMENT;

NANOSTRUCTURED MATERIALS;

EID: 46249123810     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.11.067     Document Type: Conference Paper

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