메뉴 건너뛰기




Volumn 87, Issue 3, 2000, Pages 1110-1117

Raman scattering characterization of Si(100) implanted with mega-electron-volt Sb

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0011969690     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371987     Document Type: Article
Times cited : (39)

References (20)
  • 1
    • 0004875329 scopus 로고
    • edited by M. Wittmer, J. Stimmell, and M. Strathman Materials Research Society, Pittsburg
    • T. E. Seidel, in Materials Issues in Silicon Integrated Circuit Processing, edited by M. Wittmer, J. Stimmell, and M. Strathman (Materials Research Society, Pittsburg, 1986) p. 3.
    • (1986) Materials Issues in Silicon Integrated Circuit Processing , pp. 3
    • Seidel, T.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.