Fabrication and characterization of self-scrolling Si/Cr micro- and nanostructures

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 1268-1271

  Zhang, Li ^b   Dong, Lixin ^a,c   Bell, Dominik J ^c   Nelson, Bradley J ^a,c   Gruetzmacher, Detlev A ^b  

^a IEEE

^b PAUL SCHERRER INSTITUTE   (Switzerland)

^c ETH ZURICH   (Switzerland)

Author keywords

Flexibility; Nanoring; Nanorobotic manipulation; Nanospiral; NEMS

Indexed keywords

MAGNETIC FILMS; MOLECULES; NANOBELTS; NANORINGS; NANOROBOTICS; NANOSTRUCTURED MATERIALS; NEMS; OPTICAL DESIGN; ROBOTICS; SILICON WAFERS; VAN DER WAALS FORCES;

BI LAYER FILMS; BI-LAYERS; INDIVIDUAL (PSS 544-7); INTERNATIONAL CONFERENCES; MEMORY EFFECTS; MICRO AND NANOSTRUCTURES; MICRO FLUIDICS; MICRO-TUBES; MOLECULAR SYSTEMS; NANOROBOTIC MANIPULATORS; SI(0 0 1); VAN DER WAALS;

NANOSTRUCTURES;

EID: 46249086456     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334712     Document Type: Conference Paper

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