Development of a haptic user interface for surface sensing and nanomanipulation based on atomic force microscope

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 900-904

  Liu, Lianqing ^a,b   Jiao, Niandong ^a   Tian, Xiaojun ^a   Dong, Zaili ^a   Xi, Ning ^a,c   Li, Wen J ^a,d   Wang, Yuechao ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c Michigan State University   (United States)

^d CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

AFM; Force feedback; Nanomanipulation

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; HAPTIC INTERFACES; HELIUM; MANIPULATORS; MICROMANIPULATORS; MOLECULES; NANOTECHNOLOGY; NEMS; STANDARDS; USER INTERFACES;

(1 1 0) SURFACE; (MIN ,MAX ,+) FUNCTIONS; ATOMIC FORCE MICROSCOPE (AFM); INTERNATIONAL CONFERENCES; MOLECULAR SYSTEMS; NANO MANIPULATION; REAL-TIME OPERATIONS; SUB-NANOMETER RESOLUTION; SURFACE SENSING;

EXTREME ULTRAVIOLET LITHOGRAPHY;

EID: 46149124351     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334561     Document Type: Conference Paper

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