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Volumn , Issue , 2006, Pages 775-778
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Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators
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Author keywords
MEMS; Microactuator; Microsensor; Piezoelectric microcantilever; PZT thin film
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Indexed keywords
ACTUATORS;
CHEMICAL SENSORS;
COMPOSITE MICROMECHANICS;
ELECTRODES;
METALLIZING;
METALS;
MICROACTUATORS;
MICROANALYSIS;
MICROSENSORS;
MOLECULES;
NEMS;
OPTICAL DESIGN;
PHOTORESISTS;
PIEZOELECTRIC ACTUATORS;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRIC TRANSDUCERS;
SEMICONDUCTING LEAD COMPOUNDS;
STRUCTURAL METALS;
THIN FILM DEVICES;
ACTUATION DISPLACEMENT;
ACTUATION FORCES;
BULK MICRO-MACHINING;
CANTILEVER STRUCTURES;
INTERNATIONAL CONFERENCES;
LEAD ZIRCONATE TITANATE (PZT) FILMS;
METAL ELECTRODES;
MICRO MANIPULATION SYSTEMS;
MICRO-ROBOTS;
MICROCANTILEVERS (MC);
MOLECULAR SYSTEMS;
MULTIFUNCTIONAL CANTILEVERS;
PIEZOELECTRIC CANTILEVERS;
PIEZOELECTRIC CHARGES;
PIEZOELECTRIC ELEMENTS (PZT);
PIEZOELECTRIC FILMS;
POTENTIAL APPLICATIONS;
PZT THIN FILMS;
SENSING RESOLUTION;
SILICON CANTILEVERS;
TECHNOLOGY PLATFORMS;
PIEZOELECTRICITY;
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EID: 46149111704
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/NEMS.2006.334893 Document Type: Conference Paper |
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Times cited : (4)
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References (4)
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