STEM imaging applications in deep-sub-micron failure analysis and process characterization

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn 2003-January, Issue , 2003, Pages 206-209

  Li, K ^a   Er, E ^a   Redkar, S ^a  

^a CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING; INTEGRATED CIRCUITS;

DEEP SUB-MICRON; PROCESS CHARACTERIZATION; STEM IMAGING;

FAILURE ANALYSIS;

EID: 45749153639     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2003.1222767     Document Type: Conference Paper

References (8)

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