Dual waveband MW/LW focal plane arrays grown by MOVPE on silicon substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6940, Issue , 2008, Pages

  Edwards, James W ^a   Giess, Jean ^a   Graham, Andrew ^a   Gordon, Neil T ^a   Hails, Janet E ^a   Hall, David J ^a   Hydes, Alan J ^a   Lees, David J ^a  

^a QINETIQ   (United Kingdom)

Author keywords

Dual band; MCT; MOVPE

Indexed keywords

COMPUTER NETWORKS; CORRELATION METHODS; CRYSTALLOGRAPHY; FOCAL PLANE ARRAYS; FOCUSING; INFRARED RADIATION; LITHOGRAPHY; METALLORGANIC VAPOR PHASE EPITAXY; MOLECULAR BEAM EPITAXY; NONMETALS; SILICON; TECHNOLOGY;

(100) SILICON; BACKGROUND LIMITED PERFORMANCE (BLIP); DEFECT COUNTS; DEFECT GENERATION; DEFECTIVE DEVICES; DUAL-WAVEBAND; FOCAL PLANES; GENERAL (CO); INFRARED TECHNOLOGIES; LARGE AREAS; LWIR BAND; MBE GROWTH; MOVPE GROWTH; MULTI LAYER STRUCTURES; MWIR BAND; SILICON (111) SUBSTRATES; THREADING DISLOCATIONS (TD); WAVE BANDS; WAVEBANDS;

SUBSTRATES;

EID: 45749144729     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.786619     Document Type: Conference Paper

References (16)

1. D. J. Hall, L. Buckle, N. T. Gordon, J. Giess, J. E. Hails, J. W. Cairns, R. M. Lawrence, A. Graham, R. S. Hall, C. Maltby and T. Ashley, "High performance long-wavelength HgCdTe infrared detectors grown on silicon substrates", Appl. Phys. Lett. 85, 2113 (2004).
2. D. J. Hall, L. Buckle, N. T. Gordon, J. Giess, J. E. Hails, J. W. Cairns, R. M. Lawrence, A. Graham, R. S. Hall, C. Maltby and T. Ashley, "Long wavelength infrared focal plane arrays fabricated from HgCdTe grown on silicon substrates", Proc. SPIE 5406, 317 (2004).
3. J. W. Cairns, L. Buckle, G. J. Pryce, J. E. Hails, J. Giess, M. A. Crouch, D. J. Hall, A. J. Hydes, A. Graham, A. J. Wright, C. J. Hollier, D. J. Lees, N. T. Gordon, T. Ashley, "Integrated infrared detectors and readout circuits", Proc. SPIE 620614 (2006).
4. J. A. Wilson, E. A. Patten, G. R. Chapman, K. Kosai, B. Baumgratz, P. Goetz, S. J. Tighe, R. F. Risser, R. F. Herald, W. A. Radford, T. Tung and W. A. Terre, "Integrated two-color detection for advanced focal plane arrays (FPA) applications", Proc. SPIE 2274, 117 (1994).
5. M. A. Kinch, "HDVIP FPA technology at DRS Infrared Technologies", Proc. SPIE 4369, 566 (2001).
6. E. R. Blazejewski, J. M. Arias, G. M. Williams, W. Mclevige, M. Zandian and J. Pasko, "Bias-switchable dual-band HgCdTe infrared photodetector", J. Vac. Sci. Technol. B10, 1626 (1992).
7. 1-xTe", J. Cryst. Growth 55, 107(1981).
8. 1-xTe using organometallics", J. Vac. Sci. Technol. 21, 178-181 (1982).
9. C. D. Maxey, J. P. Camplin, I. T. Guilfoy, J. Gardener, R. A. Lockett, C. L. Jones, P. Capper, M. Houlton, and N. T. Gordon, "Metal-organic vapor-phase epitaxial growth of HgCdTe device heterostructures on three-inch-diameter substrates", J. Electron. Mater. 32, 656 (2003).
10. J. Giess, M. A. Glover, N. T. Gordon, A. Graham, M. K. Haigh, J. E. Hails, D. J. Hall and D. J. Lees, "Dual-waveband infrared focal plane arrays using MCT grown by MOVPE on silicon substrates", Proc. SPIE 5783, 316 (2005).
11. T. J. de Lyon, J. A. Roth, O. K. Wu, S. M. Johnson, and C. A. Cockrum, "Direct molecular-beam epitaxial growth of ZnTe(100) and CdZnTe( 100)/ZnTe(100) on Si(100) substrates", Appl. Phys Lett 63, 818 (1993).
12. 1-xTe", J. Cryst. Growth 79, 940 (1986).
13. J. E. Hails, "Identification of the volatile decomposition products produced in the deposition of (Hg,Cd)Te by MOVPE", Advanced Materials for Optics and Electronics 3, 151 (1994).
14. J. Tunnicliffe, S. J. C. Irvine, O. D. Dosser, and J. B. Mullin, "A new MOVPE technique for the growth of highly uniform CMT", J. Cryst. Growth 68, 245 (1984).
15. E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, M. D. Newton, P. M. Goetz, V. K. Randall, A. M. Gallagher, G. K. Pierce, E. A. Patten, R. A. Coussa, K. Kosai, W. A. Radford, L. M. Giegerich, J. M. Edwards, S. M. Johnson, S. T. Baur, J. A. Roth, B. Nosho, T. J. De Lyon, J. E. Jensen and R. E. Longshore, "HgCdTe focal plane arrays for dual-color mid- and long-wavelength infrared detection" J. Electron. Mater. 33, 509 (2004).
16. G. Destefanis, P. Ballet, J. Baylet, P. Castelein, O. Gravrand, J. Rothman, F. Rothan, G. Perrais, J. P. Chamonal, A. Million, P. Tribolet, B. Terrier, E. Sanson, P. Costa and L. Vial, "Bi-color and dual-band HgCdTe infrared focal plane arrays at DEFIR", Proc. SPIE 62060R (2006).