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Volumn 1052, Issue , 2008, Pages 65-70
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A novel micro tensile testing instrument with replaceable testing specimen by parylene passivation technique
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ALUMINUM;
COATINGS;
COMPOSITE MICROMECHANICS;
ELASTIC MODULI;
ELASTICITY;
ELECTROCHEMICAL SENSORS;
ELECTROMECHANICAL DEVICES;
INSTRUMENT TESTING;
MATERIALS TESTING APPARATUS;
MECHATRONICS;
MEMS;
MICROMECHANICS;
MOLECULAR BEAM EPITAXY;
PASSIVATION;
PIGMENTS;
RESIDUAL STRESSES;
SOLIDS;
STRENGTH OF MATERIALS;
STRESSES;
SURFACE MICROMACHINING;
TENSILE TESTING;
TESTING;
THICK FILMS;
THIN FILM DEVICES;
THIN FILMS;
(ABIOTIC AND BIOTIC) STRESS;
DIFFERENTIAL CAPACITANCE SENSOR;
MATERIALS RESEARCH SOCIETY (MRS);
MEMS FABRICATION;
MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS);
MICROFABRICATION PROCESSES;
PARYLENE;
TENSILE LOADS;
TEST MATERIALS;
TEST SPECIMENS;
TESTING INSTRUMENTS;
YOUNG'S MODULUS (IGC: E14/K14);
MICROELECTROMECHANICAL DEVICES;
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EID: 45749119515
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (8)
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