Protection layer influence on capacitive micromachined ultrasonic transducers performance

Materials Research Society Symposium Proceedings

Volumn 1052, Issue , 2008, Pages 223-228

  Jeanne, Edgard ^a,b   Meynier, Cyril ^a,c   Teston, Franck ^a   Certon, Dominique ^a   Felix, Nicolas ^c   Roy, Mathieu ^b   Alquier, Daniel ^a  

^a UNIVERSITÉ DE TOURS   (France)

^b STMICROELECTRONICS   (France)

^c Université Francois Rabelais ^*  (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; ELECTRIC BREAKDOWN; ELECTROACOUSTIC TRANSDUCERS; ELECTROCHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; FLOW OF FLUIDS; MECHATRONICS; MEMS; MICROMECHANICS; MULTITASKING; PASSIVATION; PIGMENTS; PLATES (STRUCTURAL COMPONENTS); TECHNOLOGY; TRANSDUCERS; ULTRASONIC EQUIPMENT; ULTRASONIC MEASUREMENT; ULTRASONIC TRANSDUCERS; ULTRASONIC WAVES; ULTRASONICS;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); DEVICE PERFORMANCES; MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS); MICROELECTROMECHANICAL-SYSTEMS (MEMS) TECHNOLOGY; PASSIVATION LAYERS; TWO MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 45749111771     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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