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Volumn 518, Issue , 1998, Pages 3-8
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Resonance method: an attractive way to evaluate mechanical properties of thin gold films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELASTIC MODULI;
ELECTRIC FIELD EFFECTS;
FATIGUE OF MATERIALS;
GOLD;
MECHANICAL PROPERTIES;
MECHANICAL TESTING;
MICROMACHINING;
Q FACTOR MEASUREMENT;
RESIDUAL STRESSES;
SCANNING ELECTRON MICROSCOPY;
THICKNESS MEASUREMENT;
THIN FILMS;
ELECTRICAL EXCITATION;
MICROMECHANICAL TEST;
PARTICULAR DENSITY;
STRESS GRADIENT;
METALLIC FILMS;
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EID: 0032292978
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-518-3 Document Type: Conference Paper |
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Times cited : (5)
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References (13)
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