SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Microelectronic Engineering

Volumn 64, Issue 1-4, 2002, Pages 53-61

Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors

(3) Cabañas, Albertina a Blackburn, Jason M a Watkins, James J a

a University of Massachusetts (United States)

Author keywords

Chemical fluid deposition; Copper metallization; Supercritical fluids

Indexed keywords

CARBON DIOXIDE; COPPER; DEPOSITION; ETCHING; HYDROGEN; METALLIZING; OXIDATION; SILICON; SUBSTRATES; SUPERCRITICAL FLUIDS;

CHEMICAL FLUID DEPOSITION;

METALLIC FILMS;

EID: 0036776396 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(02)00783-9 Document Type: Conference Paper

Times cited : (86)

References (19)

1
- 0004004688
- VCH, Weinheim
- (1994) The Chemistry of Metal CVD
- Kodas, T.T.¹ Hampden-Smith, M.J.²

2
- 0035812811
- (2001) Science , vol.294 , pp. 141-145
- Blackburn, J.M.¹ Long, D.P.² Cabañas, A.³ Watkins, J.J.⁴

3
- 0035555063
- A.J. Mckerrow, Y. Shacham-Diamand, S. Zaima, T. Ohba (Eds.), Montreal, Canada: MRS
- (2001) Proceedings of Advanced Metallization Conference (AMC) 2001 , pp. 177-183
- Blackburn, J.M.¹ Cabañas, A.² Zong, Y.³ Quinn, J.D.⁴ Watkins, J.J.⁵

4
- 0004017385
- US Pat. no. 5789027, November 12
- (1996) Method of chemically depositing material onto a substrate
- Watkins, J.J.¹ McCarthy, T.J.²

5
- 0033809946
- (2000) Chem. Mater. , vol.12 , pp. 2625-2631
- Blackburn, J.M.¹ Long, D.P.² Watkins, J.J.³

6
- 0033701031
- (2000) Adv. Mater. , vol.12 , pp. 913-915
- Long, D.P.¹ Blackburn, J.M.² Watkins, J.J.³

7
- 0034839531
- (2001) Chem. Mater. , vol.13 , pp. 2023-2031
- Fernandes, N.E.¹ Fisher, S.M.² Poshusta, J.C.³ Vlachos, D.G.⁴ Tsapatsis, M.⁵ Watkins, J.J.⁶

8
- 0000028015
- (1999) Chem. Mater. , vol.11 , pp. 213-215
- Watkins, J.J.¹ Blackburn, J.M.² McCarthy, T.J.³

9
- 0003517855
- McGraw-Hill, New York
- (1987) The Properties of Gases and Liquids
- Reid, R.C.¹ Prausnitz, J.M.² Poling, B.E.³

10
- 0016917018
- (1976) Ind. Eng. Chem. Fundam. , vol.15 , pp. 59-63
- Peng, D.Y.¹ Robinson, D.B.²

11

12
- 33751158243
- and references therein
- (1994) Chem. Mater. , vol.6 , pp. 1861-1866
- Condorelli, G.G.¹ Malandrino, G.² Fragala, I.³

13
- 0000619792
- (1992) Mat. Res. Soc. Symp. Proc. , vol.250 , pp. 297-301
- Rees, W.S.¹ Caballero, C.R.²

14
- 0000900717
- (1992) Mat. Res. Soc. Symp. Proc. , vol.250 , pp. 291-296
- Chang, Y.¹ Schrader, G.L.²

15
- 0026105278
- (1991) J. Cystal Growth , vol.108 , pp. 683-687
- Armitage, D.N.¹

16
- 0023961208
- (1988) Appl. Phys. A , vol.45 , pp. 151-154
- Oehr, C.¹ Suhr, H.²

17
- 0005375181
- (1991) J. Phys. IV , vol.1 , pp. 389-395
- Wisniewski, B.¹ Durand, J.² Cot, L.³

18
- 0024764747
- (1989) J. Electrochem. Soc. , vol.136 , pp. 3525-3528
- Temple, D.¹ Reisman, A.²

19
- 0029633272
- (1995) J. Crystal Growth , vol.155 , pp. 276-285
- Louchev, O.A.¹ Popov, V.K.² Antonov, E.N.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.