Laser induced plasma in the formation of surface-microstructured silicon

Materials Letters

Volumn 62, Issue 23, 2008, Pages 3881-3883

  Liu, Shuying ^a   Zhu, Jingtao ^a   Liu, Yang ^a   Zhao, Li ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Femtosecond laser pulses; Laser induced plasma spectroscopy; Laser processing; Silicon surface microstructure

Indexed keywords

ATOMIC SPECTROSCOPY; LASER BEAMS; LASER PRODUCED PLASMAS; LASERS; LEAKAGE (FLUID); MOLECULAR SPECTROSCOPY; NONMETALS; OPTICAL EMISSION SPECTROSCOPY; PLASMA (HUMAN); PLASMAS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SILICON; SPECTRUM ANALYSIS; SURFACES; ULTRASHORT PULSES;

(1 1 0) SURFACE; (100) SILICON; AMBIENT GASES; FEMTOSECOND (FS) LASER PULSES; LASER-INDUCED PLASMAS; OPTICAL EMISSIONS; PLASMA EMISSIONS; SILICON (0 0 1) SURFACES;

EMISSION SPECTROSCOPY;

EID: 45549109266     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.05.012     Document Type: Article

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