Optical fiber accelerometer based on MEMS torsional micromirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6836, Issue , 2008, Pages

  Fanlin, Zeng ^a,b   Shaolong, Zhong ^a   Jing, Xu ^a   Yarning, Wu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Dual fiber collimator; ENEA; MNEA; Noise; Optical fiber accelerometer; Torsional micromirror

Indexed keywords

ACCELERATION; ACCELEROMETERS; AEROSPACE APPLICATIONS; COMPOSITE MICROMECHANICS; ELECTROCHEMICAL SENSORS; ELECTRON BEAM LITHOGRAPHY; EQUIPMENT TESTING; FIBER OPTIC SENSORS; FIBER OPTICS; FIBERS; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; GLASS BONDING; MATLAB; MECHANICS; MECHANISMS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; MODAL ANALYSIS; OPTICAL COLLIMATORS; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; OPTICAL SIGNAL PROCESSING; PARAMETER ESTIMATION; REACTIVE ION ETCHING; SEMICONDUCTOR DIODES; SHAPE OPTIMIZATION; SIGNAL DETECTION; SIGNAL PROCESSING; SILICON; STATIC ANALYSIS; STRUCTURAL DYNAMICS; STRUCTURAL OPTIMIZATION; TECHNOLOGY;

(100) SILICON; (E ,2E) THEORY; (R ,S)-SYMMETRIC; COUPLING ANGLES; DEEP REACTIVE ION ETCHING (DRIV); DETECTION PRINCIPLES; FINITE ELEMENT ANALYSIS (FEA); MEMS/MOEMS; MICRO MIRRORS; OPTICAL (PET) (OPET); OPTICAL POWER DETECTION; OPTICAL SIGNAL DETECTION; OPTICAL SIGNALLING; OPTICAL-INSERTION-LOSS; OPTIMIZATION METHODS; PERFORMANCE PARAMETERS; POSITIVE-INTRINSIC-NEGATIVE (PIN) DIODE; SENSITIVE STRUCTURES; STRUCTURE PARAMETERS; TEST RESULTS; TORSIONAL ANGLES; TORSIONAL MICROMIRROR;

OPTICAL FIBER COUPLING;

EID: 45549091403     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.768488     Document Type: Conference Paper

References (12)

1. Navid Yazdi, Farrokh Ayazi, and Khalil Najali, "Micromachined Inertial Sensors", Proceedings of the IEEE, Vol.86, No.8, 1640-1659(1998).
2. Lee B, "Review of the present status of optical fiber sensors", Optical Fiber Technology, 9, 57-79 (2003).
3. Hong-nan Li, Dong-sheng Li and Gang-Bing Song, "Recent applications for fiber optic sensors to health monitoring in civil engineering", Engineering Structures, 26, 1647-1657 (2004).
4. Farhad Ansari, "Fiber optic health monitoring of civil structures using long gage and acoustic sensors", Smart Mater. Struct, 14,S1-S7(2005).
5. Dae-Hyun Kim and Maria Q. Feng, "A Novel Optical Fiber Accelerometer System for Monitoring Civil Infrastructure", IEEE Sensors 2005 Conf., 1107-1111(2005).
6. Shifu Yuan and Nabeel A.Riza. "General formula for coupling-loss characterization of single-mode fiber collimators by use of gradient-index rod lenses". Applied Optics, 38(15),3214-3222(1999).
7. Pejman Monajemi and Farrokh Ayazi. "Design Optimization and Implementation of a Microgravity Capacitive HAPRPSS Accelerometer". IEEE Sensors Journal, 6 (1), 39-46 (2006).
8. Zoran Djuric, "Mechanisms of noise sources in microelectromechanical systerms", Microelectronics Reliability, 40, 919-932(2000).
9. Thomas B.Gabrielson, "Mechanical-Thermal Noise in Micromachined Acoustic and Vibration Sensors", IEEE Transactions on Electron Devices, Vol 40,No.5, 903-909(1993).
10. Bernhard E.Boser and Roger T.Howe, "Surface Micromachined Accelerometers", IEEE, Journal of Solid-State circuits, Vol.31, No.3, 366-375(1996).
11. Minhang Bao, Analysis and Design Principles of MEMS Devices, Elsevier, 2000.
12. Janos P. Makai and Jozsef J. Makai and Janos Balazs. "Noise characteristics of bootstrapped photovoltaic and photoconductive detectors", Part of the SPIE Conference on Electronics for Soild State Sensors, SPIE 3794, 108-114(1999).