Generalized inverse problem for partially coherent projection lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6924, Issue , 2008, Pages

  Davids, Paul S ^a   Bollepalli, Srinivas B ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Inverse imaging; Matrix coherence theory; Partial coherence; Sampling theory

Indexed keywords

AEROSPACE APPLICATIONS; INTEGER PROGRAMMING; INVERSE PROBLEMS; MAPS; MATHEMATICAL TECHNIQUES; OPTIMIZATION; PHOTOLITHOGRAPHY; SET THEORY; SOLUTIONS;

APPLIED (CO); COHERENCE THEORY; GENERAL (CO); GENERALIZED INVERSES; ILL-POSED; INTENSITY DISTRIBUTIONS; ITERATIVE TECHNIQUES; OPTICAL MICRO LITHOGRAPHY; PRINCIPLE COMPONENT ANALYSIS (PCA); PROJECTION LITHOGRAPHY; SPARSE SET; WAVELENGTH (SPECTRAL) TECHNIQUES;

IMAGING TECHNIQUES;

EID: 45449117677     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772040     Document Type: Conference Paper

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