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Volumn 462, Issue 1-2, 2008, Pages 235-239
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Improvement in the mechanical properties of tin oxide thin films due to vapour chopping
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Author keywords
Oxidation; Thin films; Vapour deposition
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Indexed keywords
ADHESION;
CHEMICAL OXYGEN DEMAND;
COATINGS;
DEPOSITS;
MECHANICAL PROPERTIES;
OXIDATION;
OXIDE FILMS;
PHOTOACOUSTIC EFFECT;
SOLIDS;
STRESSES;
THICK FILMS;
THIN FILMS;
TIN;
TINNING;
TITANIUM COMPOUNDS;
VAPOR DEPOSITION;
(ABIOTIC AND BIOTIC) STRESS;
(PL) PROPERTIES;
AIR AGEING;
ELSEVIER (CO);
INTRINSIC STRESSES;
OXIDATION TEMPERATURES;
TIN OXIDE THIN FILMS;
MOLECULAR BEAM EPITAXY;
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EID: 45449094783
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2007.08.003 Document Type: Article |
Times cited : (8)
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References (20)
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