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Volumn 45, Issue 7, 2004, Pages 2018-2022
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In-situ optical reflection measurement of a Si(100) surface under hydrogen ion irradiation
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Author keywords
Hydrogen implantation; Optical reflection; Silicon
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Indexed keywords
AMORPHIZATION;
ANNEALING;
ELECTRONIC STRUCTURE;
HYDROGEN;
HYDROGEN BONDS;
LIGHT REFLECTION;
NANOSTRUCTURED MATERIALS;
POSITIVE IONS;
DISPLACEMENT EFFECT;
HYDROGEN IMPLANTATION;
ION IRRADIATION;
OPTICAL REFLECTION;
ION BOMBARDMENT;
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EID: 4544321166
PISSN: 13459678
EISSN: None
Source Type: Journal
DOI: 10.2320/matertrans.45.2018 Document Type: Conference Paper |
Times cited : (5)
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References (15)
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