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Volumn 39, Issue 7 B, 2000, Pages 4427-4431
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Hydrogen effect on damage structure of Si(100) surface studied by in Situ raman spectroscopy
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Author keywords
Damaging mechanism; Defect formation; Hydrogen effect; Ion irradiation; Raman spectroscopy; Silicon
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Indexed keywords
AMORPHIZATION;
CHEMICAL BONDS;
CRYSTAL DEFECTS;
CRYSTAL STRUCTURE;
CRYSTALLINE MATERIALS;
HYDROGEN;
ION IMPLANTATION;
IRRADIATION;
RAMAN SPECTROSCOPY;
REACTIVE ION ETCHING;
DAMAGING MECHANISM;
HYDROGEN EFFECTS;
ION IRRADIATION;
SEMICONDUCTING SILICON;
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EID: 0034224503
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.39.4427 Document Type: Article |
Times cited : (3)
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References (25)
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