Development features in large-range nanoscale coordinate metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6995, Issue , 2008, Pages

  Gruhlke, Martin ^a   Recknagel, Christian ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

AFM; Controller setting; Coordinate measurement; DML; Nanometrology

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER NETWORKS; EXTREME ULTRAVIOLET LITHOGRAPHY; INDUSTRIAL MANAGEMENT; MEASUREMENTS; MICROSCOPIC EXAMINATION; MICROSYSTEMS; QUALITY ASSURANCE; SCANNING PROBE MICROSCOPY; TECHNOLOGY; TOTAL QUALITY MANAGEMENT;

ATOMIC FORCE MICROSCOPE (AFM); COORDINATE METROLOGY; FIXE D POINTS; LARGE AREAS; MICRO SYSTEMS TECHNOLOGY (MST); NANO SCALING; NANO-METROLOGY; NANO-STRUCTURED; NANOMETER RESOLUTIONS; OPTICAL (PET) (OPET); POSITIONING SYSTEMS; PRECISE POSITIONING SYSTEM; SCAN RANGE;

IMAGING TECHNIQUES;

EID: 45349088247     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780821     Document Type: Conference Paper

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