A theoretical study of a novel multi-terminal pressure sensor based on the transversal piezoresistive effect

ECS Transactions

Volumn 9, Issue 1, 2007, Pages 561-569

  Coraucci, G ^a   Fruett, F ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

(100) SILICON; ELECTROCHEMICAL SOCIETY (ECS); GEOMETRICAL CORRECTION; MICROELECTRONICS TECHNOLOGY; PIEZO-TRANSDUCERS; PIEZORESISTIVE; PIEZORESISTIVE EFFECTS; SENSOR LAYOUT; SENSOR SENSITIVITIES; WHEATSTONE;

ACOUSTOOPTICAL EFFECTS; ASPECT RATIO; COMPUTER NETWORKS; DIMENSIONAL STABILITY; ELECTRONICS INDUSTRY; GEOMETRY; MICROELECTRONICS; NEODYMIUM; OPTICAL PROPERTIES; PHOTOACOUSTIC EFFECT; PIEZOELECTRIC TRANSDUCERS; PORT TERMINALS; PRESSURE; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SENSORS; SILICON; TECHNOLOGY; TOPOLOGY;

DETECTORS;

EID: 45249113704     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2766930     Document Type: Conference Paper

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