Silicon pressure transducer with differential sensitive element based on transverse electromotive force effect

Sensors and Actuators, A: Physical

Volumn 90, Issue 1-2, 2001, Pages 89-95

  Zhadko, I P ^a   Babichev, G G ^a   Kozlovskiy, S I ^a   Romanov, V A ^a   Sharan, N N ^a   Zinchenko, E A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Pressure transducer; Transverse voltage strain gauge

Indexed keywords

DIAPHRAGMS; ELASTIC MODULI; FOURIER TRANSFORMS; HALL EFFECT; PIEZOELECTRIC TRANSDUCERS; SILICON SENSORS; STRAIN GAGES; VOLTAGE MEASUREMENT;

TRANSVERSE VOLTAGE STRAIN GAUGES (TVSG);

PRESSURE TRANSDUCERS;

EID: 0035341461     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00458-7     Document Type: Article

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