An aplication of conform mapping to the calculation of FTSP transducer with various geometrical form

International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings

Volumn 1, Issue , 2002, Pages 49-58

  Gridchin, A V ^a  

^a NOVOSIBIRSK STATE TECHNICAL UNIVERSITY   (Russian Federation)

Author keywords

Buildings; Circuits; Integral equations; Sensor phenomena and characterization; Silicon; Transducers

Indexed keywords

BUILDINGS; CHARACTERIZATION; ELECTRIC RESISTANCE; ELECTRON DEVICES; GEOMETRY; INTEGRAL EQUATIONS; MAPPING; NETWORKS (CIRCUITS); SILICON;

ANALYTICAL EQUATIONS; ELECTRICAL CIRCUIT; GEOMETRICAL CORRECTION; GEOMETRICAL EFFECT; GEOMETRICAL FORMS; INPUT AND OUTPUTS; PIEZOTRANSDUCER; SILICON PRESSURES;

TRANSDUCERS;

EID: 84948737487     PISSN: 18153712     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SREDM.2002.1024306     Document Type: Conference Paper

References (11)

1. A.V. Gridchin, V.A. Gridchin The four-terminal piezotransducer: theory and comparison with piezoresistive bridge. // Sensors and Actuators: A (phys.). - 1997.- v.58.- p.219-223
2. R. Buchhold, R. Gollee, A. Nakadal, G. Gerlach A novel approach to modeling the transfer functions of four-terminal-transducer pressure sensors within a single simulation tool. // Sensors and Actuators: A (phys.). - 2000.- v.80.- p.15-22
3. I.P. Zhadko, G.G. Babichev, S.I. Kozlovsky, V.A. Romanov, N.N. Sharan, E.A. Zinchenko Silicon pressure transducer with differential sensitive element based on transverse electromotive force effect. // Sensors and Actuators: A (phys.). - 2001.- v.90.- p.89-95
4. Kanda Y. Optimum design considerations for silicon pressure sensors using a four-terminal gauge. // Sensors and Actuators.- 1983.- v.4.- p.199-206
5. Bao M.H., Wang Y. Analysis and design of a four-terminal silicon pressure sensor at the centre of diaphragm. // Sensors and Actuators.- 1987.- v.12.- p.49-56
6. nd IEEE-Russia Conf. on High Power Microwave Electronics: Measurement, Identification, Application (MIA-ME'99), Proc. - Novosibirsk, Russia.- 1999.- p.111.62
7. V.A. Gridchin, R.A. Pirogova Numerical simulation of multiterminal silicon piezoelements. // Sensors and Actuators: A (physical). - 1998.- v.65.- p.5-9
8. Versnel W. Analysis of a circular Hall plate with equal finite contacts. // Solid-State Electron.- 1981.- v.24.- p.63-68
9. Versnel W. Analysis of symmetrical Hall plates with finite contacts. // J. Appl. Phys.- 1981.- v.52, No 7.- p.4659-4665
10. Versnel W. Analysis of Hall-plate shaped van der Pauw structures. // Solid-State Electron.- 1980.- v.25.- p.557-563
11. van der Pauw L.J. A method of measuring specific resistivity and Hall effect of discs of arbitrary shape. // Philips Res. Rep.- 1958.- v.13, No 1.- p.1-9