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Electrochemical and Solid-State Letters

Volumn 11, Issue 8, 2008, Pages

Method for determining the lubrication mechanism of post-ILD CMP brush scrubbing

(2) Sun, T a Philipossian, A a,b

a University of Arizona (United States)

b Araca Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRUSHES; CHEMICAL ANALYSIS; CONCRETE CONSTRUCTION; FLUIDICS; FRICTION; MECHANICS; MECHANISMS; NANOTECHNOLOGY; SLIP FORMING; SPECTRUM ANALYSIS; SPECTRUM ANALYZERS; SPEECH;

(N-1) CRITERION; CHEMICAL-MECHANICAL-PLANARIZATION (CMP); ELECTROCHEMICAL SOCIETY (ECS); FRICTION FORCES; ILD CMP; INTER LEVEL DIELECTRIC (ILD); LUBRICATION MECHANISMS; MECHANICAL INTERACTIONS; SOLUTION PH; SPECTRAL ANALYSES; STICK-SLIP PHENOMENA; TOTAL AMOUNT; TRIBOLOGICAL MECHANISM;

TRIBOLOGY;

EID: 45249103297 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.2929065 Document Type: Article

Times cited : (6)

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