SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 11, Issue 7, 2007, Pages 177-184

Spatially controlled atomic layer deposition in porous membranes

(4) Elam, J W a Libera, J A a Stair, P C a,b Pellin, M J a

a ARGONNE NATIONAL LABORATORY (United States)

b NORTHWESTERN UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COATINGS; ALUMINUM OXIDE; ANODIC OXIDATION; ATOMS; DIFFUSION COATINGS; II-VI SEMICONDUCTORS; MONTE CARLO METHODS; NIOBIUM OXIDE; OXIDE MINERALS; TITANIUM DIOXIDE; VANADIUM PENTOXIDE; ZINC OXIDE;

ANODIC ALUMINUM OXIDE MEMBRANES; ELEMENTAL MAPPING; KNUDSEN DIFFUSION; POROUS MEMBRANES; POROUS SUBSTRATES; REACTANT EXPOSURES; SEPARATION DEVICES; TRIMETHYL ALUMINUMS;

ATOMIC LAYER DEPOSITION;

EID: 45249094795 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2779082 Document Type: Conference Paper

Times cited : (4)

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