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Volumn 11, Issue 7, 2007, Pages 81-90

Molecular layer deposition of organic and hybrid organic-inorganic films

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ETHYLENE; ETHYLENE GLYCOL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IN SITU PROCESSING; MATHEMATICAL TRANSFORMATIONS; ORGANIC-INORGANIC MATERIALS; POLYAMIDES; POLYCONDENSATION; QUARTZ CRYSTAL MICROBALANCES; RAYON; SURFACE CHEMISTRY;

EID: 45249086416     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2779072     Document Type: Conference Paper
Times cited : (10)

References (23)
  • 3
    • 0003363794 scopus 로고    scopus 로고
    • Atomic Layer Deposition
    • H. S. Nalwa, Editor, Academic Press: San Diego, CA
    • M. Ritala, M. Leskela, "Atomic Layer Deposition" in Handbook of Thin Film Materials, H. S. Nalwa, Editor. 2001, Academic Press: San Diego, CA
    • (2001) Handbook of Thin Film Materials
    • Ritala, M.1    Leskela, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.