Mechanical characterizations of laser microwelds for MEMS packaging

Materials Research Society Symposium - Proceedings

Volumn 782, Issue , 2003, Pages 343-348

  Han, Wei ^a   Pryputniewicz, Ryszard J ^a  

^a Worcester Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CHEMICAL VAPOR DEPOSITION; DEFORMATION; HEAT AFFECTED ZONE; HEATING; LASER BEAM EFFECTS; LASER PULSES; MELTING; SURFACE ROUGHNESS;

LASER MICROWELDS; MICROFABRICATION; PRECISION MACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 2942657662     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-782-a5.82     Document Type: Conference Paper

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