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Volumn 91, Issue 18, 2007, Pages 1743-1748
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Hard inclusions and their detrimental effects on the wire sawing process of multicrystalline silicon
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Author keywords
Multicrystalline silicon; Si3N4 particles; SiC particles; Wire sawing
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Indexed keywords
CRYSTALLINE MATERIALS;
MATHEMATICAL MODELS;
SILICON WAFERS;
STRESS CONCENTRATION;
MULTICRYSTALLINE SILICON;
SAWING RIDGES;
SIC PARTICLES;
WIRE SAWING;
SILICON COMPOUNDS;
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EID: 34548219124
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2007.06.001 Document Type: Article |
Times cited : (46)
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References (8)
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