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Volumn 82, Issue 4, 2004, Pages 577-585
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Investigation of foreign particles in polycrystalline silicon using infrared microscopy
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Author keywords
Infrared microscopy; Polycrystalline Si; SiC particles; SiNO particles
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Indexed keywords
ELECTRIC CURRENT MEASUREMENT;
ELECTRON BEAMS;
GRAIN BOUNDARIES;
IMPURITIES;
INFRARED RADIATION;
SCANNING ELECTRON MICROSCOPY;
SILICON SOLAR CELLS;
STACKING FAULTS;
DISLOCATIONS;
INFRARED MICROSCOPY;
SIC PARTICLES;
SINO PARTICLES;
POLYSILICON;
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EID: 2342630559
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2003.11.031 Document Type: Article |
Times cited : (10)
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References (9)
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