Speciation of deeply buried TiOx nanolayers with grazing-incidence x-ray fluorescence combined with a near-edge x-ray absorption fine-structure investigation

Physical Review B - Condensed Matter and Materials Physics

Volumn 77, Issue 23, 2008, Pages

  Pollakowski, Beatrix ^a   Beckhoff, Burkhard ^a   Reinhardt, Falk ^a   Braun, Stefan ^b   Gawlitza, Peter ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 44949209371     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.77.235408     Document Type: Article

References (39)

1. L. G. Parratt, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.95.359 95, 359 (1954).
2. D. K. G. de Boer, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.44.498 44, 498 (1991).
3. J. M. Bloch, M. Sansone, F. Rondelez, D. G. Peiffer, P. Pincus, M. W. Kim, and P. M. Eisenberger, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.54.1039 54, 1039 (1985).
4. R. S. Becker, J. A. Golovchenko, and J. R. Patel, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.50.153 50, 153 (1983).
5. G. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1993).
6. S. O. Kucheyev, T. van Buuren, T. F. Baumann, J. H. Satcher, T. M. Willey, R. W. Meulenberg, T. E. Felter, J. F. Poco, S. A. Gammon, and L. J. Terminello, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.69.245102 69, 245102 (2004).
7. F. M. F. de Groot, J. C. Fuggle, B. T. Thole, and G. A. Sawatzky, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.41.928 41, 928 (1990).
8. L. D. Finkelstein, E. I. Zabolotzky, M. A. Korotin, S. N. Shamin, S. M. Butorin, E. Z. Kurmaev, and J. Nordgren, X-Ray Spectrom. XRSPAX 0049-8246 10.1002/xrs.596 31, 414 (2002).
9. V. S. Lusvardi, M. A. Barteau, J. G. Chen, J. Eng, Jr., B. Frühberger, and A. Teplyakov, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(97)00740-1 397, 237 (1998).
10. E. Stoyanov, F. Langenhorst, and G. Steinle-Neumann, Am. Mineral. AMMIAY 0003-004X 10.2138/am.2007.2344 92, 577 (2007).
11. R. Klockenkämper, Total-Reflection X-Ray Fluorescence Analysis (Wiley, New York, 1997).
12. B. Henke, E. Gullikson, and J. Davis, At. Data Nucl. Data Tables ADNDAT 0092-640X 10.1006/adnd.1993.1013 54, 181 (1993).
13. B. Beckhoff and G. Ulm, Adv. X-Ray Anal. AXRAAA 0376-0308 44, 349 (2001).
14. J. Stöhr, NEXAFS Spectroscopy (Springer-Verlag, Berlin, 1996).
15. W. Drube, R. Treusch, T. K. Sham, A. Bzowski, and A. V. Soldatov, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.58.6871 58, 6871 (1998).
16. A. V. Soldatov, M. Kasrai, and G. M. Bancroft, Solid State Commun. SSCOA4 0038-1098 10.1016/S0038-1098(00)00261-1 115, 687 (2000).
17. J. J. Rehr and R. C. Albers, Rev. Mod. Phys. RMPHAT 0034-6861 10.1103/RevModPhys.72.621 72, 621 (2000).
18. F. de Groot, Chem. Rev. (Washington, D.C.) CHREAY 0009-2665 10.1021/cr9900681 101, 1779 (2001).
19. P. Hoffmann, O. Baake, B. Beckhoff, W. Ensinger, N. Fainer, A. Klein, M. Kosinova, B. Pollakowski, V. Trunova, and G. Ulm, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 575, 78 (2007).
20. F. Senf, U. Flechsig, F. Eggenstein, W. Gudat, R. Klein, H. Rabus, and G. Ulm, J. Synchrotron Radiat. JSYRES 0909-0495 10.1107/S0909049597020323 5, 780 (1998).
21. F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, R. Klein, B. Meyer, D. Rost, D. Schmitz, M. Veldkamp, and J. Weser, Proc. SPIE PSISDG 0277-786X 10.1117/12.406678 4146, 72 (2000).
22. B. Beckhoff, R. Klein, M. Krumrey, F. Scholze, R. Thornagel, and G. Ulm, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/S0168-9002(99) 01427-8 444, 480 (2000).
23. B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, J. Weser, and G. Ulm, Anal. Chem. ANCHAM 0003-2700 10.1021/ac071236p 79, 7873 (2007).
24. F. Scholze and M. Procop, X-Ray Spectrom. XRSPAX 0049-8246 10.1002/xrs.472 30, 69 (2001).
25. M. Krumrey, M. Gerlach, F. Scholze, and G. Ulm, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 568, 364 (2006).
26. J. Chen, D. Fischer, J. H. Hardenbergh, and R. B. Hall, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(92)90738-R 279, 13 (1992).
27. D. A. Fischer, J. Colbert, and J. L. Gland (AIP, New York, 1989), Vol. 60, pp. 1596-1602.
28. B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, and H. Wolff, Handbook of Practical X-Ray Fluorescence Analysis (Springer-Verlag, Berlin, 2006).
29. M. Kolbe, B. Beckhoff, M. Krumrey, and G. Ulm, Spectrochim. Acta, Part B SAASBH 0584-8547 10.1016/j.sab.2005.03.018 60, 505 (2005).
30. W. T. Elam, B. Ravel, and J. R. Sieber, Radiat. Phys. Chem. RPCHDM 0969-806X 10.1016/S0969-806X(01)00227-4 63, 121 (2002).
31. H. Ebel, R. Svagera, M. F. Ebel, A. Shaltout, and J. H. Hubbell, X-Ray Spectrom. XRSPAX 0049-8246 10.1002/xrs.667 32, 442 (2003).
32. J. J. Cuomo, S. M. Rosnagel, and H. R. Kaufman, Handbook of Ion Beam Processing Technology (Springer-Verlag, Berlin, 1989).
33. M. Cevro and G. Carter, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/28/ 9/026 28, 1962 (1995).
34. C.-C. Ting, S.-Y. Chen, and D.-M. Liu, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1309039 88, 4628 (2000).
35. P. Gawlitza, S. Braun, A. Leson, S. Lipfert, and M. Nestler, Vak. Forsch. Prax. VFPREO 0947-076X 10.1002/vipr.200700310 19, 37 (2007).
36. D. L. Windt, Comput. Phys. CPHYE2 0894-1866 10.1063/1.168689 12, 360 (1998).
37. B. Beckhoff, R. Fliegauf, P. Hönicke, M. Kolbe, M. Müller, B. Pollakowski, J. Weser, and G. Ulm, ECS Trans. ECSTF8 10.1149/1.2778670 11, 273 (2007).
38. G. Zschornack, Handbook of X-Ray Data (Springer-Verlag Berlin, 2007).
39. F. M. F. de Groot, J. Faber, J. J. M. Michiels, M. T. Czyzyk, M. Abbate, and J. C. Fuggle, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.48.2074 48, 2074 (1993).