Assembly concept of a magnetic levitation system for a linear micro actuator

2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007

Volumn 4, Issue , 2008, Pages 347-352

  Cvetkovic, S ^a   Ruffert, C ^a   Gatzen, Hans H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

(E ,3E) PROCESS; AIR GAPS; ASSEMBLY PROCESSING; CRITICAL DIMENSION (CD); FIRST GENERATION (1G); GENERAL (CO); GUIDE SYSTEMS; INTERNATIONAL CONFERENCES; INTERNATIONAL DESIGNS; LINEAR ACTUATORS; MAGNETIC (CE); MAGNETIC LEVITATION (MAGLEV) SYSTEM; MICRO ACTUATORS; MICRO COMPONENTS; MICRO MOTORS; SELF ALIGNMENT (SA); STEP MOTORS; SYSTEM INTEGRATION (SI); TECHNICAL CONFERENCES; V-GROOVES;

ACTUATORS; ARCHITECTURAL DESIGN; ASSEMBLY; COMPUTER NETWORKS; COMPUTER PROGRAMMING LANGUAGES; COMPUTERS; EIGENVALUES AND EIGENFUNCTIONS; EMBEDDED SYSTEMS; ENGINEERING; INFORMATION SYSTEMS; INTEGRATED CIRCUITS; MAGNETIC FIELD EFFECTS; MAGNETIC LEVITATION VEHICLES; MECHATRONICS; MICROOPTICS; MOBILE TELECOMMUNICATION SYSTEMS; MOTORS; SELF ASSEMBLY; SEMICONDUCTING SILICON COMPOUNDS; STATORS; SYNCHRONOUS MOTORS; TECHNOLOGY; WIRELESS TELECOMMUNICATION SYSTEMS;

MAGNETIC LEVITATION;

EID: 44849094743     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2007-35266     Document Type: Conference Paper

References (8)

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2. M. Hahn, M. Bedenbecker, U. Brand, H.H. Gatzen: Evaluation of a Linear Hybrid Micro Step Motor. Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meeting of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 493-505, 2004
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4. M. Hahn, M. Bedenbecker, H.H. Gatzen: Fabrication and Evaluation of a Linear Hybrid Micro Step Motor. 10th Joint MMM/Intermag Conf. 2007, Baltimore, Maryland, USA (accepted for IEEE Transaction on Magnetics)
5. W. Dai, K. Lian, W. Wang: Design and Fabrication of a SU-8 Based Electrostatic Microactuator, Microsyst. Technology, V.13, pp. 271-277, 2007
6. N. Dechev, L. Ren, W Liu, William L. Cleghorn, J. K. Mills: Development of a 6 Degree of Freedom Robotic Micromanipulator for Use in 3D MEMS Microassembly, Proc. of the 2006 IEEE Int. Conf. on Robot, and Autom., pp. 281-288, 2006
7. H.H. Gatzen, S. Cvetkovic: Challenges and Solutions for the Assembly of a Linear Micro Step Motor, EUSPEN07, 2007, Bremen, Germany, Vol. II, pp. 384-387, 2007
8. C. Ruffert, R. Gehrking, B. Ponick, H.H. Gatzen: Magnetic Levitation Assisted Guide for a Linear Microactuator. IEEE Trans. on Magn., Vol. 42, No. 11, pp. 3785-3787, 2006