An investigation on technologies to fabricate magnetic microcomponents for miniaturized actuator systems

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 237-240

  Budde, T ^a   Fohse M ^a   Majjer, B ^b   Luthje H ^b   Brauer G ^b   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTROPLATING; ETCHING; IONS; MAGNETIC FLUX; MAGNETIC PERMEABILITY; NEODYMIUM ALLOYS; NICKEL ALLOYS; PERMANENT MAGNETS; SAMARIUM ALLOYS; SOFT MAGNETIC MATERIALS; SPUTTER DEPOSITION;

ELECTROMAGNETIC MICROACTUATOR SYSTEM; HARD MAGNETIC MATERIAL; MAGNETIC MICROCOMPONENT; MINIATURIZED ACTUATOR SYSTEM; WET ETCHING;

MICROACTUATORS;

EID: 1842454753     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0352-5     Document Type: Article

References (9)

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