XPS characterization of thin (Al2O3) x(TiO2)1-x films deposited on silicon

Journal of Physics: Conference Series

Volumn 113, Issue 1, 2008, Pages

  Vitanov, P ^a   Stefanov, P ^b   Harizanova, A ^a   Ivanova, T ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

^b INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 44649152962     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/113/1/012036     Document Type: Article

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