High speed interferometric ellipsometer

Optics Express

Volumn 16, Issue 11, 2008, Pages 7778-7788

  Tsai, Chien Chung ^a,b   Wei, Hsiang Chun ^a,b   Huang, Sheng Lung ^b   Lin, Chu En ^c   Yu, Chih Jen ^c   Chou, Chien ^a,c  

^a NATIONAL YANG MING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT MODULATION; MEASUREMENT THEORY; PARAMETER ESTIMATION;

ELLIPSOMETRIC PARAMETERS (EP) MEASUREMENTS; HIGH SPEED INTERFEROMETRIC ELLIPSOMETER (HSIE);

ELLIPSOMETRY;

ARTICLE; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; INTERFEROMETRY; REFRACTOMETRY; THEORETICAL MODEL;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; MODELS, THEORETICAL; REFRACTOMETRY;

EID: 44649129201     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.007778     Document Type: Article

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