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Volumn 43, Issue 22, 2004, Pages 4362-4366
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Interferometric ellipsometer with wavelength-modulated laser diode source
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC NOISE;
ALGORITHMS;
BROADBAND AMPLIFIERS;
DIELECTRIC DEVICES;
ELECTRIC CURRENTS;
ELLIPSOMETRY;
EXTRAPOLATION;
INTERFEROMETRY;
LIGHT POLARIZATION;
MIRRORS;
OPTICAL BEAM SPLITTERS;
REFRACTIVE INDEX;
ELECTRICAL SIGNALS;
FRINGE ANALYSIS;
MICHELSON INTERFEROMETERS;
TEMPERATURE TUNING;
SEMICONDUCTOR LASERS;
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EID: 4043182895
PISSN: 1559128X
EISSN: 15394522
Source Type: Journal
DOI: 10.1364/AO.43.004362 Document Type: Article |
Times cited : (17)
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References (9)
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