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Volumn 43, Issue 22, 2004, Pages 4362-4366

Interferometric ellipsometer with wavelength-modulated laser diode source

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; ALGORITHMS; BROADBAND AMPLIFIERS; DIELECTRIC DEVICES; ELECTRIC CURRENTS; ELLIPSOMETRY; EXTRAPOLATION; INTERFEROMETRY; LIGHT POLARIZATION; MIRRORS; OPTICAL BEAM SPLITTERS; REFRACTIVE INDEX;

EID: 4043182895     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.004362     Document Type: Article
Times cited : (17)

References (9)
  • 1
    • 0020781845 scopus 로고
    • Automated laser interferometric ellipsometry and precision reflectometry
    • H. F. Hazebroek and W. M. Visser, "Automated laser interferometric ellipsometry and precision reflectometry," J. Phys. E. 16, 654-661 (1983).
    • (1983) J. Phys. E. , vol.16 , pp. 654-661
    • Hazebroek, H.F.1    Visser, W.M.2
  • 2
    • 0000781144 scopus 로고
    • Interferometric ellipsometry
    • H. F. Hazebroek and A. A. Holscher, "Interferometric ellipsometry," J. Phys. E. 6, 822-826 (1973).
    • (1973) J. Phys. E. , vol.6 , pp. 822-826
    • Hazebroek, H.F.1    Holscher, A.A.2
  • 3
    • 0028255167 scopus 로고
    • New ultra-fast interferometric ellipsometry systems based on a Zeeman two-frequency laser
    • M. M. Wind and K. Hemmes, "New ultra-fast interferometric ellipsometry systems based on a Zeeman two-frequency laser," Meas. Sci. Technol. 5, 37-46 (1994).
    • (1994) Meas. Sci. Technol. , vol.5 , pp. 37-46
    • Wind, M.M.1    Hemmes, K.2
  • 4
    • 0031998602 scopus 로고    scopus 로고
    • Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster
    • K. Hemmes, M. A. Hamstra, K. R. Koops, M. M. Wind, T. Schram, J. de Laet, and H. Bender, "Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster," Thin Solid Films 313-314, 40-46 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 40-46
    • Hemmes, K.1    Hamstra, M.A.2    Koops, K.R.3    Wind, M.M.4    Schram, T.5    De Laet, J.6    Bender, H.7
  • 5
    • 84975551231 scopus 로고
    • Diode laser direct modulation heterodyne interferometer
    • K. Tatsuno and Y. Tsunoda, "Diode laser direct modulation heterodyne interferometer," Appl. Opt. 26, 37-40 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 37-40
    • Tatsuno, K.1    Tsunoda, Y.2
  • 6
    • 0027652465 scopus 로고
    • A low-noise high-speed diode laser current controller
    • K. G. Libbrecht and J. L. Hall, "A low-noise high-speed diode laser current controller," Rev. Sci. Instrum. 64, 2133-2135 (1993).
    • (1993) Rev. Sci. Instrum. , vol.64 , pp. 2133-2135
    • Libbrecht, K.G.1    Hall, J.L.2
  • 7
    • 0016060676 scopus 로고
    • High precision alignment procedure for an ellipsometer
    • J. R. Zeidler, R. B. Kohles, and N. M. Bashara, "High precision alignment procedure for an ellipsometer," Appl. Opt. 13, 1115-1120 (1974).
    • (1974) Appl. Opt. , vol.13 , pp. 1115-1120
    • Zeidler, J.R.1    Kohles, R.B.2    Bashara, N.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.