Novel method for error limit determination in x-ray reflectivity analysis

Journal of Physics D: Applied Physics

Volumn 41, Issue 11, 2008, Pages

  Tiilikainen, J ^a   Mattila, M ^a   Hakkarainen, T ^a   Lipsanen, H ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ATOMIC LAYER DEPOSITION; COMPUTER SIMULATION; ERROR ANALYSIS; MEAN SQUARE ERROR; SILICON;

ORIGINAL FIT; PARRATT'S FORMALISM; X-RAY REFLECTIVITY ANALYSIS;

X RAY ANALYSIS;

EID: 44449152952     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/11/115302     Document Type: Article

References (13)

1. Parratt L G 1954 Phys. Rev. 95 359-80
2. Nevot L and Croce P 1980 Rev. Phys. Appl. 15 761-80
3. Wormington M, Panaccione C, Matney K M and Bowen K 1999 Phil. Trans. R. Soc. Lond. A 357 2827-48
4. Ulyanenkov A, Omote K and Harada J 2000 Physica B 283 237-41
5. imek D, Rafaja D and Kub J 2001 Mater. Struct. 8 16-21
6. Ulyanenkov A and Sobolewski S 2005 J. Phys. D: Appl. Phys. 38 A235-8
7. Tiilikainen J, Tilli J-M, Bosund V, Mattila M, Hakkarainen T, Airaksinen V-M and Lipsanen H 2007 J. Phys. D: Appl. Phys. 40 215-8
8. Tiilikainen J, Bosund V, Tilli J-M, Sormunen J, Mattila M, Hakkarainen T and Lipsanen H 2007 J. Phys. D: Appl. Phys. 40 6000-4
9. Luokkala B B, Garoff S and Suter R M 2000 Phys. Rev. E 62 2405-15
10. Filippino A 1995 J. Phys.: Condens. Matter 7 9343-56
11. Tiilikainen J, Bosund V, Mattila M, Hakkarainen T, Sormunen J and Lipsanen H 2007 J. Phys. D: Appl. Phys. 40 4259-63
12. Tiilikainen J, Tilli J-M, Bosund V, Mattila M, Hakkarainen T, Sormunen J and Lipsanen H 2007 J. Phys. D: Appl. Phys. 40 7497-501
13. Puurunen R L 2005 J. Appl. Phys. 97 121301