Implementation considerations of various virtual metrology algorithms

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 276-281

  Su, Yu Chuan ^a,b   Lin, Tung Ho ^a,c   Cheng, Fan Tien ^a,c   Wu, Wei Ming ^c  

^a IEEE

^b FAR EAST UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Back propagation neural network (BPNN); Multiple regression (MR); Run to run control (R2R control); Simple recurrent neural network (SRNN); Virtual metrology (VM); Wafer to wafer advanced process control (W2W APC)

Indexed keywords

ALGORITHMS; BACKPROPAGATION; NEURAL NETWORKS; PROCESS CONTROL; REAL TIME SYSTEMS; REGRESSION ANALYSIS;

BACK-PROPAGATION NEURAL NETWORK (BPNN); MULTIPLE REGRESSION (MR); RUN-TO-RUN CONTROL (R2R CONTROL); SIMPLE RECURRENT NEURAL NETWORK (SRNN);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 44449086000     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341740     Document Type: Conference Paper

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